Enables measurement of planar and transmitted wavefronts of φ60 mm high-precision planar plates.
Small area specimens (φ5 mm to φ25 mm) can be measured by using the beam compressor in combination with the beam compressor.
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Enables measurement of planar and transmitted wavefronts of φ60 mm high-precision planar plates.
Small area specimens (φ5 mm to φ25 mm) can be measured by using the beam compressor in combination with the beam compressor.
Light Source: He-Ne laser (Class 1 Laser Product)
Wavelength: 632.8nm
Type: Fizeau type intereferometer
Aperature size: φ60㎜
Measurement Sensitivity: λ/2(Approx. 0.3μm/fringe)
Accuracy: λ/20
Magnification: ×1
Body Dimention: Approx. 300㎜×320㎜×590㎜
Body Weight: Approx. 30kg
Power source: AC100V 50/60Hz 1A
China Standard Voltage: 220V
Safety Standard: IEC61010-1 IEC60825-1
EMC/EMI:IEC61000-3-2 IEC61000-3-3