A wide variety of spherical shapes can be determined by using a reference lens of φ60 that matches the object to be measured.
A wide measurement range is covered by a rich lineup of 8 types of reference lenses.
Two types of spherical stands are available: a standard type (120 mm) and a long axis type (360 mm), which can be selected according to the stroke required for the measurement of the specimen.
Flat surface measurement is also possible by attaching a reference plate for flat surface measurement.
Light Source: He-Ne laser (Class 1 Laser Product)
Wavelength: 632.8nm
Type: Fizeau type intereferometer
Aperature size: φ60㎜
Measurement Sensitivity: λ/2(Approx. 0.3μm/stripe)
Accuracy: λ/20
Magnification: ×1
Body Dimention: Approx. 300㎜×320㎜×785㎜
Body Weight: Approx. 43kg
Power source: AC100V 50/60Hz 1A
China Standard Voltage: 220V
Safety Standard: IEC61010-1 IEC60825-1
EMC/EMI：IEC61000-3-2 IEC61000-3-3
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