Enables planar measurement and transmitted wavefront measurement of φ102㎜/φ150㎜ high-precision planar plates.
The 8.6x zoom function enables measurement of small-diameter specimens.
Large aperture interferometer capable of measuring even small parts.
Enables planar measurement and transmitted wavefront measurement of φ102㎜/φ150㎜ high-precision planar plates.
The 8.6x zoom function enables measurement of small-diameter specimens.
Light Source: He-Ne laser (Class 1 Laser Product)
Wavelength: 632.8nm
Type: Fizeau type intereferometer
Aperature size: φ100㎜/φ150㎜ *Select at the time of purchase
Measurement Sensitivity: λ/2(Approx. 0.3μm/stripe)
Accuracy: λ/20
Magnification: ×1~×8.6 zoom
Body Dimention: Approx. 305㎜×365㎜×765㎜
Body Weight: Approx. 56kg
Power source: AC100V 50/60Hz 1A
China Standard Voltage: 220V
Safety Standard: IEC61010-1 IEC60825-1
EMC/EMI:IEC61000-3-2 IEC61000-3-3